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MEMS flow velocity sensors

Micro-Electrical-Mechanical-Systems (MEMS) flow velocity sensors are at the core of the revolution in industry, autonomous driving and flying

Our lab collaborates with Prof. Slava Krylov laboratory to develop a line of new, active, non-linear fluid flow velocity and velocity gradient sensors based on non-linear MEMS multi-stable systems.

Read more in these articles:

  1. Y. Kessler, A. Liberzon and S. Krylov, "On Sampling Rate Limits in Bistable Microbeam Sensors," in Journal of Microelectromechanical Systems, vol. 30, no. 6, pp. 980-989, Dec. 2021, doi: 10.1109/JMEMS.2021.3117838.

  2. Torteman, B., Kessler, Y., Liberzon, A. et al. Micro-beam resonator parametrically excited by electro-thermal Joule’s heating and its use as a flow sensor. Nonlinear Dyn 98, 3051–3065 (2019).

  3. Y. Kessler, A. Liberzon and S. Krylov, "Buckling response of electrothermally actuated micro-beams to parallel and transverse flow," 2016 IEEE SENSORS, 2016, pp. 1-3, doi: 10.1109/ICSENS.2016.7808577.

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